Wafer loading into OEM tools
mechatronic offers handling systems for the loading and unloading of various substrates into processing and metrology equipment for semiconductor manufacturing. With our specialized know-how of non-standard substrates handling systems enable equipment makers to broaden the range of applications and their servable markets — to include the fast growing area of MEMS, power and automotive devices.
Our integration expertise allows partners to either go with standardized interfaces or to use mechatronic´s systems to communicate with the MES system of the factory. The EFEMs can be delivered in sizes ranging from 2-wide to 4-wide.



  Check out our wafer loader (mWL)


  Check out our wafer loader neo (mWL neo)