The Scanners mSC series detect the exact position of 150/200 mm (6"/8") wafers in a cassette (slot allocation, wafer warpage and wafer location).

The cassettes have to be placed manually on the scanner. The detection of customized mechatronic cassettes as well as SEMI standard cassettes with 13 to 25 slots is provided. Several mechatronic End Effectors can be used for loading and unloading of a cassette. All wafers are monitored before and during the whole handling process.