Chucks

By using a special porous ceramic, the wafer is held on its backside without contacting the wafer chipside. The vacuum holding force is evenly spread on the entire backside surface to flatten the wafer. mechatronic chucks are designed for secure placement of various wafer types (e.g. standard, (ultra-)thin/warped, eWLB, wafer mit support ring, film-frame, MEMS). These chucks are mainly integrated in OEM-equipment (e.g. for inspection measurement, defect detection,..) under atmospheric conditions. Due to mechatronic in-house manufacturing capabilities, we are able to design and produce all interfaces according to your requirements.

The following Chucks are available:

Needle chuck (Thin Wafer Chuck)
By using a special porous ceramic, the wafer is held on its backside without contacting the wafer chipside. The vacuum holding force is evenly spread on the entire backside surface to flatten the wafer.

Wafer size:

 

 

  • 6"
  • 8"
  • 12"
  • 6"/8" & 8"/12" multi size

Frame size:

 

 

  • 6"
  • 8"
  • 12"

Key Advantages:

  • Dual zone ceramic vacuum chuck enables the flattening of warped wafers

Wafer Types:

  • thin/warped 
  • wafer mit support ring

Product Datasheets:

Lift-pin (vacuum) Chuck
Lift-pin chucks are designed for planarization of various wafer types (e.g. eWLB). Due to patented seal design a controlled vaccum force is applied to flatten the warped wafer.

Wafer size:

  • 8", 12"
  • 330mm

Key Advantages:

  • Patented design enables flattening of warped eWLB wafers

Wafer Types:

  • eWLB

Product Datasheets:

4- Point Chuck (MEMS Chuck)
4-point chucks are designed to hold the wafer with most limited vacuum support in the exclusion area only (eg. safe MEMS wafer handling). Taking advantage of low surface contact the wafer will be accessible from both sides for further processing, eliminating wafer stress or risk of particle transfer/generation.

Wafer size:

  • Single size 6", 8" & 12"
  • Dual size 6"/8", 8"/12"

Key Advantages:

  • MEMS wafer kept in position by 4 vacuum pins in the edge exclusion area

Wafer Types:

  • MEMS

Product Datasheets: