Multiple wafer types and sizes
mechatronic systemtechnik gmbh’s proprietary end effectors, pre-aligners, mapping systems, and chucks are the reason why specialty handling approaches can be addressed. We have the ability to customize all components in our systems for various requests, to enable safe and reliable handling of nearly all substrate types used in power, sensor, and MEMS device manufacturing.
Multiple wafer types and sizes
Handling of different wafer types and sizes
mechatronic systemtechnik gmbh's proprietary end effectors can be customized for the handling of various critical substrates. As the same end effector cannot be used across wafers of different sizes, types, or handling requirements, we have developed a fully automated change mechanism for its end effectors, in combination with an end effector change station, where up to 12 different end effectors can be stored in the system.
End effector change station
The end effector change station is one of the modules that can be configured on our systems. With docking space for two change stations, our systems can accommodate up 12 end effectors for handling various non-standard wafer types of different sizes.
Automated coupling of end effectors
The change of the end effector is fully automated based on the various handling recipes. For added assurance, the end effectors are individually coded to avoid mispocessing. mechatronic systemtechnik gmbh is also capable of supplying multiple connections (e.g. air, electrical) through the coupling.