mechatronic wafer sorter (mWS)
Wafer sorting tools are critical to any wafer fabrication or material handling facility as they enable automated handling of wafers and allow fab operations both, to track each wafer throughout the manufacturing process, and to completely eliminate any risk of damage and particle contamination.They are essential for economic inventory and material flow management in the modern semiconductor industry. Our wafer sorters are designed to offer these capabilities for critical wafers as they are used for a variety of new technologies.
mechatronic wafer sorter (mWS)
Wafer sorting
The mechatronic systemtechnik gmbh´mWS series represents the latest generation of wafer sorters and sets new standards in safe handling of complex substrates (thin, ultra-thin or warped wafers). Consistent implementation of mechatronic systemtechnik gmbh´s modular design concept guarantees full compatibility with the widest variety of wafer carriers, mechatronic systemtechnik gmbh sorters mWS can be configured to be a flexible solution for transfer, sorting splitting and merging operations .
The mechatronic systemtechnik gmbh´mWS series of wafer sorting systems is capable to fully eliminate manual wafer handling in todays semiconductor fabrication.
Key features
- Reduced stress and contamination to wafers
- mechatronic systemtechnik gmbh´proprietary components adopted to the characteristics of the substrate
- Unique software and hardware integration knowledge
- Highest reliability and safety from unique wafer handling sequence:
- Continuous monitoring/ sensing of wafers
- Unique handshake for maximum reliability
- Highest Throughput
- WID reading (up to 5 readers)
- Integrated with Green Light Inspection
- Back and front side handling with minimal contact (edge exclusion only)
- Flipping
- Capable for sorting of thin wafers, TAIKO wafers, glass wafers (including metalized notch finding), MEMS wafers and wafers in film frames
- Automated End Effector change
- Multiple wafer sizes 150mm&200mm, 200mm & 300mm
- Main frame from 2LP to 4LP
- Full SECS/GEM integration
Key benefits
- Configuration and design optimized to customer wafer characteristics and handling requirement
- Enables sorting operation for critical wafers
- Lowest contamination, wafer breakage and maximized yield
- Maximum uptime and availability by lowest maintenance effort
- Lowest cost of ownership
Configuration options
mWS for thin wafer
Right from the start, mechatronic systemtechnik gmbh has been supplying the industry with sorting tools for thin wafers. Today, we have a wide range of options integrated into our systems, and we continue to help manufacturers to sort thin wafers safely and reliably.
mWS film frame
Sorting of film frames has a different set of requirements than that for sorting wafers. mechatronic systemtechnik gmbh applies its technology and components for handling, sorting, and processing wafers to its film frame sorters — availing the best features in wafer sorters to film frames as well.
mWS deposition
Increasingly, deposition systems utilize process rings or carriers to optimize defect performance and to minimize efforts for deposition chamber cleaning. The issue with many deposition systems is that automated integrated handling is not always cost-effective.
In such situations, mechatronic systemtechnik gmbh employs its specialty components and integrates them into the wafer sorter. This enables wafers to be handled on the active side, only contacting the technical edge. Semiconductor companies rely on this approach especially when there are long process times or significant efforts that prevent integration into the process equipment.
Configuration options
mWS for thin wafer
Right from the start, mechatronic systemtechnik gmbh has been supplying the industry with sorting tools for thin wafers. Today, we have a wide range of options integrated into our systems, and we continue to help manufacturers to sort thin wafers safely and reliably.
mWS film frame
Sorting of film frames has a different set of requirements than that for sorting wafers. mechatronic systemtechnik gmbh applies its technology and components for handling, sorting, and processing wafers to its film frame sorters — availing the best features in wafer sorters to film frames as well.
mWS deposition
Increasingly, deposition systems utilize process rings or carriers to optimize defect performance and to minimize efforts for deposition chamber cleaning. The issue with many deposition systems is that automated integrated handling is not always cost-effective.
In such situations, mechatronic systemtechnik gmbh employs its specialty components and integrates them into the wafer sorter. This enables wafers to be handled on the active side, only contacting the technical edge. Semiconductor companies rely on this approach especially when there are long process times or significant efforts that prevent integration into the process equipment.
