Kontakt

Tiroler Straße 80
9500 Villach

+43-4242-33-999-0

office@mechatronic.at

mechatronic wafer loader neo (mWL neo)

With our new mechatronic systemtechnik gmbh wafer loader (mWL) neo we give you a highly flexible modular EFEM for integration with metrology and process systems.

mechatronic wafer loader (mWL neo)

Key features

  • Increased modularity to reduce production and customization effort (loadports, robot...)
  • Flexibility for substrate sizes, types and their combinations as known – Capability to handle the widest range of different wafers and frames in industry
  • Standardized main frame for short lead time and reduced costs: available in 3 sizes (2 wide, 3 wide and 4 wide)
  • All positions can be configured with all modules
  • Main software platform remains unchanged
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Key benefits

  • Industry proven mechatronic systemtechnik gmbh components
  • “One platform fits all” --> reduced complexity

One system, many options

loadport modules

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Main frame

  • Available in 3 sizes (2 wide, 3 wide and 4 wide
  • All positions can be configured with all modules

Software

  • Modular concept
  • New components (robot, loadport...) will be implemented in a module library
  • Main software platform remains unchanged

Modules

Independent modules with integrated control and safety

mechatronic systemtechnik gmbh

Tiroler Straße 80
9500 Villach
Austria

Contact

Phone: +43 4242 33 999-0
Fax: +43 4242 33 999-10

Email: office@mechatronic.at

 

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