mechatronic wafer loader neo (mWL neo)
With our new mechatronic systemtechnik gmbh wafer loader (mWL) neo we give you a highly flexible modular EFEM for integration with metrology and process systems.
mechatronic wafer loader (mWL neo)
Key features
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Increased modularity to reduce production and customization effort (loadports, robot...)
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Flexibility for substrate sizes, types and their combinations as known – Capability to handle the widest range of different wafers and frames in industry
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Standardized main frame for short lead time and reduced costs: available in 3 sizes (2 wide, 3 wide and 4 wide)
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All positions can be configured with all modules
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Main software platform remains unchanged
Key benefits
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Industry proven mechatronic systemtechnik gmbh components
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“One platform fits all” --> reduced complexity
One system, many options
Main frame
- Available in 3 sizes (2 wide, 3 wide and 4 wide
- All positions can be configured with all modules
Software
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Modular concept
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New components (robot, loadport...) will be implemented in a module library
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Main software platform remains unchanged
Modules
Independent modules with integrated control and safety