Pre-Aligners

The Pre-Aligners provide alignment for 150 mm (6") up to 300 mm (12") wafers. They center the wafer, find the precise orientation of its notch or flat and align it exactly. All our Pre-Aligners are available for single size and for dual wafer size.

Features:

  • Wafer sizes: 150 mm (6"), 200 mm (8") and 300 mm (12")
  • Wafer thickness: > 50 µm (1,97 mil)
  • eWLB wafer handling possible
  • Centering of wafers
  • Alignment of notch/flat
  • Digital vacuum sensors and "vacuum handshake"
  • OCR reader for wafer ID optional
  • Cleanroom class 4 (ISO EN 14 644-1)
  • SEMI standards compliant

The following Pre-Aligners are available: