Wafer Handling Tool EFEM (mWL)

Highest Safety in Wafer Transfer

Wafers are getting thinner with advances in manufacturing processes, making it necessary to place very thin and often strongly distorted wafers on inspection systems or post-process Stages. Wafer loaders from mechatronic can load ultra thin wafers with a thinness of as little as 50μm (micron) at the highest level of safety and reliability that exceeds all of the demands of the Semiconductor industry. mechatronic mWL series wafer loaders offer the capabilities that reduce wafer transfer time significantly compared with conventional equipment. Wafer loaders from mechatronic systemtechnik help companies to optimized yield.