Wafer Loader mWL 200
The Wafer Loader mWL 200 is designed for fully automated loading and unloading of 200 mm (8") standard wafers or e.g. eWLB wafers from cassettes onto an external chuck for visual inspection.
The mWL 200 comes with two cassette ports, a single-arm-robot and an approriate end-effector. Optional it can be equipped with a pre-aligner, a customized external chuck and a microscope table.
The adaptation to OEM tools according to customer requirements is possible.
Features:
- Wafer size: 200 mm (8”)
- Loading and unloading of a chuck
- Handling of standard- or e.g. eWLB wafers
- Handling of warped wafers
- Optimized footprint
- OCR reader for wafer ID optional
- FFU for better cleanliness class optional
- Cleanliness class 5 (ISO EN 14 644-1)
- CE certificated
- SEMI standards compliant
- UPS (uninterruptible power supply) optional
Product Videos
Product Images
20.Apr.2011
(Villach, Austria) The two specialists in thin wafer handling systems, mechatronic systemtechnik and ProTec Carrier Systems (PCS), are intensifying their collaboration in the field of handling thin substrates by means of T-ESC®-Technology.
07.Apr.2011
(Villach, Austria) Carinthia-based mechatronic systemtechnik gmbh manufacturer of thin-wafer handling systems announces a new edge grip end effector capable of handling 450mm (18’’) wafers.