Cassettes
The Cassettes (mCA series) are designed for storing all types of 150/200 mm (6"/8") wafers or rather for their transport between several process steps. Each cassette type is available in different customized designs.
Features:
- anodized aluminum
- polished surface
- applicable to vacuum
- PEEK stops
- temperature resistance up to 155°C
- side slit (e.g. for scanning)
- SEMI standards compliant
Optional the cassettes are available with a carrying handle, one or two H-bars and hard coated surface.
ASK FOR YOUR CUSTOMIZED SOLUTION!
Product Images
10.May.2012
mechatronic systemtechnik is participating at SEMICON West as co-exhibitor with Sico Technology
20.Apr.2011
(Villach, Austria) The two specialists in thin wafer handling systems, mechatronic systemtechnik and ProTec Carrier Systems (PCS), are intensifying their collaboration in the field of handling thin substrates by means of T-ESC®-Technology.
07.Apr.2011
(Villach, Austria) Carinthia-based mechatronic systemtechnik gmbh manufacturer of thin-wafer handling systems announces a new edge grip end effector capable of handling 450mm (18’’) wafers.