Packing Tool mPT 150/200f
The Packing Tool mPT 150/200f is a high-performance machine designed for fully automated transfer of 150 mm or 200 mm (6"/8") wafers on film frames between cassettes and shipping boxes for packing and unpacking.
The mPT 150/200f comes with two independent cassette ports for 150/200 mm (6"/8") wafers on film frames, a single-arm-robot, customized frame end-effectors 6" or 8", a packing tool containing e.g. five packing material stations and a shipping box station for wafers on film frames, as well as a touch screen. Optionally it can be equipped with an ionizer.
Features:
- Film frame sizes: for 150 mm (6") or 200 mm (8") wafers
- Packing and unpacking of film frames
- Optimized footprint
- High throughput
- Customized movement programming to achieve a maximum output
- Ionizer optional
- FFU for better cleanliness class optional
- Cleanliness class 6 (ISO EN 14 644-1)
- CE certificated
- SEMI standards compliant
- UPS (uninterruptible power supply) optional
Product Images
20.Apr.2011
(Villach, Austria) The two specialists in thin wafer handling systems, mechatronic systemtechnik and ProTec Carrier Systems (PCS), are intensifying their collaboration in the field of handling thin substrates by means of T-ESC®-Technology.
07.Apr.2011
(Villach, Austria) Carinthia-based mechatronic systemtechnik gmbh manufacturer of thin-wafer handling systems announces a new edge grip end effector capable of handling 450mm (18’’) wafers.